M163_F-theta

Design wavelength   [nm]

355

Effective focal lengt[mm]

163.0

Max. entrance   beam[mm]

10.0

Optical scan angle [±°]

16.4

Scan length [mm] (1 mirror system)

91.9

Aperture stop distance [mm]

35.2

Working distance   [mm]

193.7

Scan area for a 2 mirror system with mirror distance from lens housing for mirror 2 / mirror 1

65x65 

27.2/43.2

Max. telecentricity error [°]

2.0

Total transmission [%]

>97

Lens material

fused silica

LIDT (coating)

1.0 J/cm² per 1ns pulse at 50Hz 1.0MW/cm² cw

SP and USP usable   [P/O]

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